PRODUCTS Product Information
Sense Corporation deliver used SMIT ion implanters that meet strict quality standards.
Sense Corporation sell used SMIT ion implanter. We can also make proposals for the manufacture or modernization of obsolete parts. Please feel free to contact us. We pursue speed and cost minimization, and never compromise on quality. We deliver only products that meet the same strict standards as new products and are confirmed to be of high specifications.
01 High-Current Ion Implanter HC / High Current
02 Medium-Current Ion Implanter MC / Medium Current
03 High-Energy Ion Implanter HE / High Energy
Stock List
| Model | Wafer Size | Category | Energy Range | Vintage | Product Number | Modification Items (Example) | ||||
|---|---|---|---|---|---|---|---|---|---|---|
| Wafer Size Change | TAIKO Wafer | SiC Wafer | Al Implantation | H+ Implantation | ||||||
| NV-GSD-HE | 8 | High Energy | 10keV~3000keV | 06/01 | L35 | 6~8inch | 6~8inch | 6~8inch | ✔ | ✔ |
| NV-GSD-HE | 8 | High Energy | 10keV~3000keV | 01/06 | H96 | 6~8inch | 6~8inch | 6~8inch | ✔ | ✔ |
| NV-MC3 FOUP | 12 | Middle Current | 5Kev~750Kev | 00/12 | P06 | 6~12inch | 6~8inch | 6~8inch | ✔ | ✔ |
| NV-MC3 (CE/S2) | 12 | Middle Current | 5Kev~750Kev | 05/05 | P48 | 6~12inch | 6~8inch | 6~8inch | ✔ | ✔ |
| LEX3/LEX3-II/LEX3-M | 12 | High Current | 5keV~70keV | 06/11 | I75 | - | Asking | Asking | ✔ | |
| SHX-III/S | 12 | High Current | 0.2～50keV | 14/06 | AX34 | 8~12inch | Asking | Asking | ✔ | ✔ |
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