High-Energy Ion Implanter
PRODUCTS
Product Information
Global standard for high-energy ion implanters from which high productivity can be expected
SPEC
HE(H96）PICK UP
- Model
- NV-GSD-HE
- Product Number
- H96
- Serial Number
- H080
- Vintage
- 2001/6
- Energy Range
- 10keV～3,000keV
- Wafer Size
- 200mm
〈Basic Specification〉
- Power Supply &
Freaquancy - 200V 3φ 60Hz
- Casstte
- 4
- Servo（AC/DC）
- AC
- Source
- ELS（no VAP）
- Shower Type
- N/A
- Gas
- BF3, PH3, AsH3
