Medium-Current Ion Implanter
PRODUCTS
Product Information
The state-of-the-art, high-performance MC3 medium-current ion implanter that pursues the highest level of implantation quality in the world
SPEC
MC3(P06）PICK UP
- Model
- NV-MC3
- Product Number
- P06
- Serial Number
- P006
- Vintage
- 2000/12
- Energy Range
- 5keV～750keV
- Wafer Size
- 300mm
〈Basic Specification〉
- Power Supply &
Freaquancy - 200V 3φ 50Hz
- Casstte
- 4
- Servo（AC/DC）
- AC
- Source
- ELS（no VAP）
- Shower Type
- Electron Shower
- Gas
- BF3, PH3, AsH3
