High-Current Ion Implanter
PRODUCTS
Product Information
The SHX series that enables ultra-low energy ion implantation with high accuracy, high quality, and high beam current
SPEC
SHXⅢS(AX34）PICK UP
- Model
- SHX-Ⅲ/S
- Product Number
- AX34
- Serial Number
- X053
- Vintage
- 2014/6
- Energy Range
- 0.2keV～50keV
- Wafer Size
- 300mm
〈Basic Specification〉
- Power Supply &
Freaquancy - 200V 3φ 50Hz
- Casstte
- 4
- Servo（AC/DC）
- AC
- Source
- ELS（no VAP）
- Shower Type
- Plasma Shower
- Gas
- BF3, PH3, O2×2
